In Situ Simultaneous Observation of Phase Transition and Electrical Properties of Pb(Zr,Ti)O3 Thin Film by High Temperature XRD and Electrical Measurement Apparatus

Toru Onoue; Naoki Wakiya; Koichi Seo; Takanori Kiguchi; Nobuyasu Mizutani; Kazuo Shinozaki

doi:10.4028/www.scientific.net/KEM.320.53

Paper Titles

Crystal Growth and Electric-Field-Induced Strain in Bi_0.5Na_0.5TiO₃ Crystals
p.35

Piezoelectric Properties of Nd and V Cosubstituted Bi₄Ti₃O₁₂ Ceramics
p.39

Ferroelectricity of BiFeO₃ Thin Films by Pulsed Laser Deposition and Effect of Atmosphere
p.45

Electrical Properties of Perovskite-Based Ferroelectric Thin Films Modified Using Rare-Earth Elements
p.49

In Situ Simultaneous Observation of Phase Transition and Electrical Properties of Pb(Zr,Ti)O₃ Thin Film by High Temperature XRD and Electrical Measurement Apparatus
p.53

Preparation of Epitaxial LiTaO₃ Thin Films by Metal Organic Chemical Vapor Deposition and its Electrical and Optical Properties
p.57

Photovoltaic Effect with the Structural Control and its Application to the Optical Sensor
p.61

Effect on Crystal Orientation on Residual Stress and Electrical Properties of a PZT Thin Film Deposited on Buffered-Si Substrate
p.65

Orientation Control of Perovskite Epitaxial Thin Film on Silicon Substrate with Yttria-Stabilized Zirconia Buffer Layers
p.69

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In Situ Simultaneous Observation of Phase Transition and Electrical Properties of Pb(Zr,Ti)O₃ Thin Film by High Temperature XRD and Electrical Measurement Apparatus

Abstract:

Pb(Zr0.05Ti0.95)O3/(La,Sr)CoO3 thin films were prepared by pulsed laser deposition (PLD) on SrTiO3(001) substrates. Phase transition behavior of Pb(Zr0.05Ti0.95)O3 (PZT) was investigated using high temperature X-ray diffraction (HT-XRD) and high-temperature electrical measurement. The phase transition temperature of PZT thin film is larger than bulk one. In 100 and 200nm-thickness epitaxial PZT thin films, the phase transition temperatures obtained from X-ray diffraction measurement and electrical property measurement are in good agreement.