Nondestructive and Non-Contact Characterization Technique for Metal Thin Films Using a Near-Field Microwave Microprobe

Hyun Jun Yoo; Jong Chel Kim; Arsen Babajayan; Song Hui Kim; Kie Jin Lee

doi:10.4028/www.scientific.net/KEM.321-323.1457

Paper Titles

Spectrum Analysis of an Ultrasonic Signal According to a Surface Status by Using a Robust Laser-Based Ultrasonic System
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Evaluation of Effect of Process Conditions on Microstructures in Plasma Sprayed Coating by In Situ Laser AE
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A Study of the Quantitative Nondestructive Evaluation Using the Cross Type Magnetic Source and the Magnetic Camera
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Numerical Analysis of Magneto-Optical Eddy Current Imaging Using FEM
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Nondestructive and Non-Contact Characterization Technique for Metal Thin Films Using a Near-Field Microwave Microprobe
p.1457

Measurement of Alloying Degree of Galvannealed Steels by X-Ray Diffraction
p.1461

Comparisons of Precision Measurement Methods for Metallic Resistivities
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Uncertainty Improvements of Metallic Resistivity Measurements by the Four-Point Probe Method
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Ultrasonic Characterization of Residual Stress in Shot Peened AI 7075 Alloy Using Acoustic Signature
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 321-323Nondestructive and Non-Contact Characterization...

Nondestructive and Non-Contact Characterization Technique for Metal Thin Films Using a Near-Field Microwave Microprobe

Abstract:

We observed the surface resistance of metal thin films by a nondestructive characterization method using a near-field scanning microwave microprobe (NSMM). The NSMM system was coupled to a dielectric resonator with a distance regulation system. To demonstrate the ability of local microwave characterization, the surface resistance dependence of the metallic thin films has been mapped nondestructively.

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Periodical:

Key Engineering Materials (Volumes 321-323)

Pages:

1457-1460

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.321-323.1457

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Online since:

October 2006

Authors:

Hyun Jun Yoo, Jong Chel Kim, Arsen Babajayan, Song Hui Kim, Kie Jin Lee

Keywords:

Near Field, Near-Field Scanning Microwave Microscope, Non-Contact, Non-Destructive, Surface Resistance

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