Preparation of ZnSe by CVD with the Solid Starting Materials

Zhen Yi Fang; Wei Pan; Hai Feng Zhu; Li Qiang Zhang; Ming Hao Fang

doi:10.4028/www.scientific.net/KEM.336-338.1225

Paper Titles

Study on the Properties of Alumina Ceramics after Implanted by Titanium Ions with MEVVA Sources
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Microstructures and Mechanical Properties of Nano-Composite Ti(C,N)-Based Cermets
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Preparation of Amorphous Si-B-C-N Powders and Nano-Sized Ceramics
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Synthesis and Properties of Ternary Carbide Ti₃AlC₂ Ceramics
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Preparation of ZnSe by CVD with the Solid Starting Materials
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Novel Visible-Band Transparent Ceramic Laser Material Mn:MgAl₂O₄
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Synthesis, Characterization of Perhydropolysilazane and its Application in the Preparation of 3D SiO_2f/Si ₃N₄ Composites
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Influence of Pressure on the Crystallization in SiO_2f/SiO₂ Composites
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Ablated Transformation and Dielectric of SiO₂/SiO₂ Nanocomposites Dipped with Silicon Resin
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 336-338Preparation of ZnSe by CVD with the Solid Starting...

Preparation of ZnSe by CVD with the Solid Starting Materials

Abstract:

In this paper, particular CVD processes of so-called Se method with solid substances as starting materials was investigated to fabricate ZnSe. On the basis of detailed experimental researches, the growth model and dominant regime of deposition rate were discussed. ZnSe of high optical properties was produced under optimized process conditions. The grain size of CVD ZnSe by Se method is less than 10μm, and its average transmittance in the wavelength range of 0.55~20μm is up to 70%.