In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator

Hee Yeoun Kim; Ki Suk Woo; Yoon Joon Choi; Yong Soo Oh

doi:10.4028/www.scientific.net/KEM.345-346.761

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In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator

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Key Engineering Materials (Volumes 345-346)

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761-764

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https://doi.org/10.4028/www.scientific.net/KEM.345-346.761

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Online since:

August 2007

Authors:

Hee Yeoun Kim, Ki Suk Woo, Yoon Joon Choi, Yong Soo Oh

Keywords:

Finite Element Analysis (FEA), Micro Cantilever, Microactuator, Micro-Electromechanical System (MEMS), Piezoelectric, Residual Strain

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