In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator

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Periodical:

Key Engineering Materials (Volumes 345-346)

Edited by:

S.W. Nam, Y.W. Chang, S.B. Lee and N.J. Kim

Pages:

761-764

Citation:

H. Y. Kim et al., "In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator ", Key Engineering Materials, Vols. 345-346, pp. 761-764, 2007

Online since:

August 2007

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DOI: https://doi.org/10.1520/e2246-11e01

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