Micro-Raman Analysis on Scratch of Si Surface Modified by Ion Implantation

Zhen Kun Lei; Xue Min Pan; Gang Liu; Hai Yun; Zong Xin Mu

doi:10.4028/www.scientific.net/KEM.373-374.497

Paper Titles

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Real-Time Measurement of Friction Coefficient in the Frictional Performance Test of Brake Disk
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Tribological Behavior of Nano-Silicate Mineral Powder as Lubrication Oil Additive
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Experimental Study for Cutting Performance of Ti_(1-x)Al_xN Coated Drills
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Micro-Raman Analysis on Scratch of Si Surface Modified by Ion Implantation
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Cavitation Behavior of Cast Iron under Different Parameter Conditions
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Structure and Properties Investigation about a Copper-Base SHS Welding Material
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The Study of the Boundary Lubrication Mechanism of BN-C-Silicone Oil Composite Colloid at High Temperature
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Two Surface Treatment Processes and Their Influence on Magnesium Electrochemical Activity
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 373-374Micro-Raman Analysis on Scratch of Si Surface...

Micro-Raman Analysis on Scratch of Si Surface Modified by Ion Implantation

Abstract:

Surface modification mechanism on scratch of ion implanted p-Si (100) is investigated by scanning electric microscopy and micro-Raman spectroscopy. Raman experimental results reveal that the amorphous Si appears near the scratch during the scratching process, while the ion implantation adjusts the structural parameters of the amorphous Si and changes the residual stress state of the surface scratch from tension to compression. Moreover, Raman experimental results reveal that the laser power synchronously decreases Raman shift and full width of half maximum intensity (FWHM). The laser heating effect can be neglected because a lower laser power is selected in our measurements.