Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Abstract:

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The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

Info:

Periodical:

Key Engineering Materials (Volumes 389-390)

Edited by:

Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara

Pages:

144-150

DOI:

10.4028/www.scientific.net/KEM.389-390.144

Citation:

T. Ohta et al., "Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools ", Key Engineering Materials, Vols. 389-390, pp. 144-150, 2009

Online since:

September 2008

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Price:

$35.00

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