Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools
The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
T. Ohta et al., "Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools ", Key Engineering Materials, Vols. 389-390, pp. 144-150, 2009