Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Abstract:

The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

• Periodical: Key Engineering Materials (Volumes 389-390)
• Pages: 144-150
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.389-390.144
• Online since: September 2008
• Authors: Tsutomu Ohta, Ji Wang Yan, Sunao Kodera, Shuuma Yajima, Naoyuki Horikawa, Youichi Takahashi, Tsunemoto Kuriyagawa
• Keywords: Coolant, Diamond Turning, Ductile Cutting, Infrared Lens, Single Crystal Silicon, Tool Wear

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