Study on the Surface Quality of Optical Glass in Ultrasonic-Magnetorheological Compound Finishing

Abstract:

The paper presents a newly developed optical polishing method, Ultrasonic-magnetorheological compound finishing (UMC finishing). The mechanism of UMC finishing is introduced in the paper. Experiments are carried out to study the surface quality of the optical glass K9 in UMC finishing. The result shows that the surface roughness Ra of the optical glass is 4.0nm, which is measured by the profile meter. The rules of surface roughness for optical glass by the main processing parameters are also acquired by the experiments. The study will be the basis for the further study of UMC finishing technology.

• Periodical: Key Engineering Materials (Volumes 389-390)
• Pages: 181-186
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.389-390.181
• Online since: September 2008
• Authors: Fei Hu Zhang, Hui Jun Wang, Jian Feng Liu, Dian Rong Luan, Yong Zhang
• Keywords: Polishing, Surface Quality, Ultra-Precision Machining, Ultrasonic-Magnetorheological Compound Finishing

References

[1] D. Golini, S. D. Jacobs and W. I. Kordonsky: Fabrication of glass aspheres using deterministic microgrinding and magnetorheological finishing, Proc. of SPIE, Vol. 2536 (1995), pp.208-211.

DOI: 10.1117/12.218425

[2] W. I. Kordonsky and D. Golini: Fundamentals of magnetorheological fluid utilization in high precision finishing, Journal of Intelligent Material Systems and Structures, Vol. 10 (2000), pp.683-689.

DOI: 10.1106/011m-cj25-64qc-f3a6

[3] F. G. Cao: Ultrasonic Machining Technology (Chemical Industry Press, China 2000).

[4] F. H. Zhang, H. J. Wang, D. R. Luan, X. K. Shi and Y. S. Yang: Research on Magnetic Field in Ultrasonic-magnetorheological Compound Finishing. Proceeding of the 9th International Symposium on Advances in Abrasive Technology (ISAAT2006), Dalian, China. (2006).

[5] F. H. Zhang, H. J. Wang, D. R. Luan: Research on Machining Mechanics and Experiment of Ultrasonic-magnetorheological Compound Finishing. International Journal of Computer Applications in Technology. Vol. 29 (2007), pp.252-256.

DOI: 10.1504/ijcat.2007.015275

[6] H. J. Wang, F. H. Zhang and D. R. Luan: Research on Material Removal of Ultrasonic-magnetorheological Compound Finishing. International Journal of Machining and Machinability of Materials. Vol. 2 (2007), pp.50-58.

DOI: 10.1504/ijmmm.2007.012666

[7] H. J. Wang, F. H. Zhang, H. Zhao, D. R. Luan, Y. C. Chen: Study on Optical Polishing of Optical Glass by means of Ultrasonic-magnetorheological Compound Finishing. Proc. of SPIE. Vol. 6722 (2007), p. 67221P1-67221P5.

DOI: 10.1117/12.783019

[8] H. J. Wang, F. H. Zhang, H. Zhao, D. R. Luan, Y. C. Chen: Effect of Several Processing Parameters on Material Removal Ratio in Ultrasonic-magnetorheological Compound Finishing by. Optics and Precision Engineering. Vol. 15 (2007), pp.1583-1588.