Ultra Precision Diamond Shaping of an Elliptical Micro-Lens Array

Choung Lii Chao; Chun Chieh Chen; Wen Chen Chou

doi:10.4028/www.scientific.net/KEM.407-408.380

Paper Titles

Micro Machining of Three-Dimensional Microstructure with the Tiny-Grinding Wheel Based on the Electro-Magneto-Rheological Effect
p.363

Effect of Potential Function on Molecular Dynamics Simulation of Copper Processing
p.368

Improvement of Thickness Uniformity of Bulk Silicon Wafer by Numerically Controlled Local Wet Etching
p.372

Figuring of Elliptical Neutron Focusing Mirror Using Numerically Controlled Local Wet Etching
p.376

Ultra Precision Diamond Shaping of an Elliptical Micro-Lens Array
p.380

Mirror Finishing of Austenitic Stainless Steel with a Cermet Insert
p.384

Study on Precision Finishing of PCD by Constant-Pressure Grinding and UV-Polishing
p.388

The Investigation of Tool Wear in Metal Machining Using Finite Element Method
p.395

An Analytical Evaluation of Drilling Temperature
p.400

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Ultra Precision Diamond Shaping of an Elliptical Micro-Lens Array

Abstract:

Micro lens array is widely used in photonics and telecommunication products, including back-light module of flat panel display devices and white-light LED illumination. The ultra precision diamond shaping method together with tool servo technique was studied and developed in this research to generate elliptical micro lens array. Each elliptical micro lens has radii in X and Y direction of 1.0 mm and 1.5 mm respectively. A high filling-factor (100 %) elliptical micro lens array with form accuracy better than 0.15μm and surface roughness around 5nm Ra was successfully fabricated.