Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass

Abstract:

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In our paper, we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully, the Ion/off ratio is ~104.

Info:

Periodical:

Key Engineering Materials (Volumes 428-429)

Edited by:

Yuan Ming Huang

Pages:

501-504

DOI:

10.4028/www.scientific.net/KEM.428-429.501

Citation:

X. Yang et al., "Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass", Key Engineering Materials, Vols. 428-429, pp. 501-504, 2010

Online since:

January 2010

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Price:

$35.00

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