Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass
In our paper, we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully, the Ion/off ratio is ~104.
Yuan Ming Huang
X. Yang et al., "Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass", Key Engineering Materials, Vols. 428-429, pp. 501-504, 2010