Video-Based Interferogram Analysis for Measuring Influence of Vibration to White Light Interferometry

Abstract:

In this paper, we present a video-based interferogram analysis method for measuring the influence of vibration on white light interferometer in terms of undesired change in optical path difference between reference and sample arms. The measurement principle is based on the analysis of interferograms which involves tracking and converting change in interferograms to physical change in optical path difference. The method proposed uses the original sensor in interferometer for data acquisition as such no additional hardware is required. Such an approach ensures that the properties of interferometer such as the bandwidth of sensor are considered and the vibration pattern recorded is close to the effective influence of vibration. With our method, the influence of vibration on white light interferometer and the performance of vibration isolation system can be objectively quantified and measured.

• Periodical: Key Engineering Materials (Volumes 447-448)
• Pages: 599-603
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.447-448.599
• Online since: September 2010
• Authors: Wee Keat Chong, Xiang Li, Sardha Wijesoma
• Keywords: Image Processing, Interferogram, Interferometry, Performance Evaluation, Vibration, VSI

References

[1] J. Hayes, Laser Focus World, vol. 38, Mar. (2002).

[2] Information on http: /www. mellesgriot. com/bioarticle/vibrationsuppression. htm.

[3] J. Millerd, N. Brock, J. Hayes, M. North-Morris, B. Kimbrough, and J. Wyant, Fringe 2005, 2006, pp.640-647.

DOI: 10.1007/3-540-29303-5_86

[4] J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. North-Morris, and J. C. Wyant, 6th International Conference on Space Optics, (2006).

DOI: 10.1117/12.2308094

[5] P.J.D. Groot, Journal of the Optical Society of America A, vol. 12, Feb. 1995, pp.354-365.

[6] D.W. Phillion, Applied Optics, vol. 36, Nov. 1997, pp.8098-8115.

[7] J. Kim, S. Yoon, J. Lee, W. Ahn, and H. Pahk, Optics and Lasers in Engineering, vol. 46, Feb. 2008, pp.140-148.

[8] H. Guo, Z. Zhao, and M. Chen, Optics and Lasers in Engineering, vol. 45, Feb. 2007, pp.281-292.

[9] L. Crescentini, Applied Optics, vol. 28, Mar. 1989, pp.1231-1234.

[10] I. Kong and S. Kim, Optical Engineering, vol. 34, Jan. 1995, pp.183-188.

[11] L.L. Deck, U.S. Patent US20080266571.

[12] J. Schmit and A. Olszak, Applied Optics, vol. 41, Oct. 2002, pp.5943-5950.

[13] I. Gurov, E. Ermolaeva, and A. Zakharov, Journal of the Optical Society of America A, vol. 21, Feb. 2004, pp.242-251.

[14] Information on http: /www. newport. com/store/genproduct. aspx?id=168090&lang=1033&Section=Detail.

[15] E. Garbusi, C. Pruss, and W. Osten, Applied Optics, vol. 47, Apr. 2008, p.2046-(2052).