Microscope Measurement of Jet-Pan Based on CCD

Dong Xiang Shao; J. Li; Ze Sheng Lu; Guang Lin Wang

doi:10.4028/www.scientific.net/KEM.455.525

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Microscope Measurement of Jet-Pan Based on CCD
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 455Microscope Measurement of Jet-Pan Based on CCD

Microscope Measurement of Jet-Pan Based on CCD

Abstract:

The jet-pan is a key part of jet-pan servo valve. Required precision of jet-pan should be guaranteed in process. CCD microscope measurement is used to deals with the measurement of jet-pan in the paper. The worepiece is enlarged by the optical microscope, and a series of image processing algorithms is used to process the image. The basic dimensions and geometrical tolerance of jet-pan are measured. And the stability error is less than ±0.5μm.