Modeling and Simulation of a planar precision positioning tables
This paper introduces the structure and basic principle of planar precision positioning tables. “The same plane” mode and magnetic driver are adopted, on the basis of analytical field, the main design parameters, such as magnet length, coil current and air gap length are defined, and the response simulation is finished. The result shows that this project can meet the request of rigid orientation.
Y. Zhang et al., "Modeling and Simulation of a planar precision positioning tables", Key Engineering Materials, Vols. 474-476, pp. 1534-1537, 2011