Research of Magnetic Stage Control System Based on DSP

Yi Zhang; Shao Liang Wei; Hui Zhi Sun

doi:10.4028/www.scientific.net/KEM.474-476.2058

Paper Titles

A Method of License Plate Location Based on Gray Images and Binary Images
p.2037

The Analysis and Detection of Double JPEG2000 Compression
p.2043

Energy Environment and Economic Sustainable Growth
p.2049

Research on Natural Characteristics of Helical Gear in Gearbox for Wind Turbine Generator
p.2054

Research of Magnetic Stage Control System Based on DSP
p.2058

Finite Element Analysis of Hybrid Ceramic Ball Bearing Contact
p.2064

A Text Hybrid Clustering Algorithm Based on HowNet Semantics
p.2071

Anti-Stealth Radar with Spread Spectrum Technology
p.2079

Application of Hyper-Dispersant in PP/OMMT Composite
p.2085

HomeKey Engineering MaterialsKey Engineering Materials Vols. 474-476Research of Magnetic Stage Control System Based on...

Research of Magnetic Stage Control System Based on DSP

Abstract:

Nanometer two-dimensional platform can realize the accurate positioning of X and Y coordinate, and it is the important parts of Nanometer Coordinate Measuring Machines (Nano-CMM),in order to realize the demand of large scale nanometer position , the magnetic stage is adopted, and magnetic stage control system is researched in this paper ,and designed the current loop, velocity loop and position loop controller, and the affection of variable control parameters are researched, and at last the magnetic stage system is realized.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 474-476)

Pages:

2058-2063

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.474-476.2058

Citation:

Cite this paper

Online since:

April 2011

Authors:

Yi Zhang, Shao Liang Wei, Hui Zhi Sun

Keywords:

Closed Loop, Control System, Coordinate Measuring Machine, Digital Signal Processor (DSP), Nanometer

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Liu Guoliang. Technical Development and the Measuring Standard of Trilinear Coordinates Measuring Machine. Heavy Machinery Science and Technology. No 2(2000). pp.26-27(In Chinese).

Google Scholar

[2] Bush K, Kunzmann H. Numerical Error Correction of Coordinate Measuring Machines[C]. Proc. Int. Symp. On Metrology for Quality Control in Production. Tokyo. 1984, pp.272-282.

Google Scholar

[3] Dufle N.A. Error Diagnosis and Compensation Using Kinematic Mode1s and Precision Error Data, Annals of the CIRP, Vol. 36/1(1987), pp.355-358.

DOI: 10.1016/s0007-8506(07)62621-3

Google Scholar

[4] CAO Ju-liang, Lü Hai-bao, CHU Xing-chun, CHEN Ting-zheng. Visual Position Measurement of 2-D Platform Based on Image Registration. Journal of Test and Measurement Technology. Vol. 18 (2004). pp.219-222(In Chinese).

Google Scholar

[5] TIAN Yan-ling, ZHANG Da-wei, YAN Bing. Development and Investigation of a XY Micro positioning Table. Modular Machine Tool & Automatic Manufacturing Technique. No12 (2005). pp.83-88(In Chinese).

Google Scholar

[6] Won-jong Kim. High-Precision Planar Magnetic Levitation [D]. American: PhD thesis at Massachusetts Institute of Technology, June (1997).

Google Scholar