Research of Magnetic Stage Control System Based on DSP

Abstract:

Article Preview

Nanometer two-dimensional platform can realize the accurate positioning of X and Y coordinate, and it is the important parts of Nanometer Coordinate Measuring Machines (Nano-CMM),in order to realize the demand of large scale nanometer position , the magnetic stage is adopted, and magnetic stage control system is researched in this paper ,and designed the current loop, velocity loop and position loop controller, and the affection of variable control parameters are researched, and at last the magnetic stage system is realized.

Info:

Periodical:

Key Engineering Materials (Volumes 474-476)

Edited by:

Garry Zhu

Pages:

2058-2063

DOI:

10.4028/www.scientific.net/KEM.474-476.2058

Citation:

Y. Zhang et al., "Research of Magnetic Stage Control System Based on DSP", Key Engineering Materials, Vols. 474-476, pp. 2058-2063, 2011

Online since:

April 2011

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Price:

$35.00

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