New Style Four-Electrode MEMS Conductivity Chip

Shao Hua Wu; Zhan Zhao; Zhen Fang; Li Dong Du; Dao Qu Geng; Jing Xu; Jun Juan Zhao

doi:10.4028/www.scientific.net/KEM.483.475

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A High-Performance Interface ASIC for Quartz Rate Sensor
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New Style Four-Electrode MEMS Conductivity Chip
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 483New Style Four-Electrode MEMS Conductivity Chip

New Style Four-Electrode MEMS Conductivity Chip

Abstract:

MEMS sensor for solution conductivity measurement has been applied widely which has many advantages such as cheap, accurate, batch fabricate, and good consistent etc. Existent MEMS conductivity sensors usually have planar structure with four short parallel electrodes so that the two voltage electrodes are tend to be polluted and consequently lead to mistakes for the conductivity test system. A new pattern of conductivity chip with an annular voltage electrode to enhance the ability of anti-pollution based on MEMS technology is going to be introduced in this article; the ANSYS simulation is applied to help demonstrate the reasons why the new pattern of conductivity chip has good ability of anti-pollution and the experiment results are also presented to show the performance of the conductivity sensor.

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Periodical:

Key Engineering Materials (Volume 483)

Pages:

475-480

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.483.475

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Online since:

June 2011

Authors:

Shao Hua Wu, Zhan Zhao, Zhen Fang, Li Dong Du, Dao Qu Geng, Jing Xu, Jun Juan Zhao

Keywords:

Anti-Pollution, Conductivity, Four-Electrode, Micro-Electromechanical System (MEMS)

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