Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

Tolga Tavşanoğlu; Erdem Baskurt; Yücel Onüralp

doi:10.4028/www.scientific.net/KEM.484.145

Paper Titles

Densification, Phases, Microstructures and Mechanical Properties of Liquid Phase-Sintered SiC
p.124

WC/Ti Composite Material Enriched with CBN Particles Produced by Pulse Plasma Sintering (PPS)
p.130

Fabrication of Transparent La₂Zr₂O₇ by Reactive Spark Plasma Sintering
p.135

Environmental Barrier Coatings for Silicon Nitride
p.139

Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering
p.145

Characterization of Thermal Properties of Micro-Sized Ceramic Powders for APS Deposition of Ceramic Layers
p.152

Optimization of Alumina Slurry Properties and Drying Conditions in the Spray Drying Process and Characterization of Corresponding Coating Fabricated by Atmospheric Plasma Spray
p.158

Fabrication of AlN/Al₂O₃ Coatings via Atmospheric Reactive Plasma Nitriding of Al₂O₃ Powders
p.166

Effect of NH₃ Atmosphere on Preparation of Al₂O₃-AlN Composite Film by Laser CVD
p.172

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Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

Abstract:

In this study, SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target in Ar/CH4 gas mixture. Three types of substrates, AISI M2 grade high speed steel, glass, and Si (100) were used in each deposition. Films were grown with different compositions at 50 oC and 250 oC by varying (0–50 %) CH4/Ar processing gas ratios. Microstructural properties of SiC films were characterized by cross-sectional FE–SEM (Field–Emission Scanning Electron Microscope) observations. XRD (X–Ray Diffractometer) results indicated that films were amorphous. Friction coefficients as low as 0.1 were obtained from SiC coatings against Al2O3 balls, according to the tribological tests. Optical investigations showed that the transparency and opacity of SiC films could easily be tailored by modifying Si and C concentrations in the coatings.