Effect of NH₃ Atmosphere on Preparation of Al₂O₃-AlN Composite Film by Laser CVD

Abstract:

Al2O3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)3) and ammonia (NH3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from α-Al2O3 to AlN gradually with increasing the mole ratio of NH3 to Ar. Al2O3-AlN composite film was obtained at NH3/Ar ratio ranged from 0.09 to 0.16 (Tdep = 862–887 K), and AlN granular grains were embedded in between α-Al2O3 polyhedral grains.

• Periodical: Key Engineering Materials (Volume 484)
• Pages: 172-176
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.484.172
• Online since: July 2011
• Authors: Yu You, Akihiko Ito, Rong Tu, Takashi Goto
• Keywords: Al₂O₃, Aluminum Nitride (AlN), Composite Film, Laser CVD

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