Ternary Phase Relation on Preparation of YBa2Cu3O7-δ Films by Laser CVD

Abstract:

Article Preview

c-axis-oriented YBa2Cu3O7- films were prepared by laser chemical vapor deposition (laser CVD) using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. YBa2Cu3O7- film almost in a single phase and that with different second phases of BaCuO2, CuBaO2, BaY2O4, CuYO2, Y2O3 and CuO were obtained by varying evaporation temperature of precursors. Ternary phase diagram as a function of evaporation amount of three precursors were obtained. The deposition rate of the c-axis-oriented YBCO film was 60 µmh-1, about 60–600 times higher than those of conventional CVD.

Info:

Periodical:

Edited by:

Takashi Goto, Yi-Bing Cheng and Takashi Akatsu

Pages:

183-187

DOI:

10.4028/www.scientific.net/KEM.484.183

Citation:

P. Zhao et al., "Ternary Phase Relation on Preparation of YBa2Cu3O7-δ Films by Laser CVD", Key Engineering Materials, Vol. 484, pp. 183-187, 2011

Online since:

July 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.