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HomeKey Engineering MaterialsKey Engineering Materials Vol. 484Ternary Phase Relation on Preparation of...

Ternary Phase Relation on Preparation of YBa₂Cu₃O_7-δ Films by Laser CVD

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Abstract:

c-axis-oriented YBa2Cu3O7- films were prepared by laser chemical vapor deposition (laser CVD) using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. YBa2Cu3O7- film almost in a single phase and that with different second phases of BaCuO2, CuBaO2, BaY2O4, CuYO2, Y2O3 and CuO were obtained by varying evaporation temperature of precursors. Ternary phase diagram as a function of evaporation amount of three precursors were obtained. The deposition rate of the c-axis-oriented YBCO film was 60 µmh-1, about 60–600 times higher than those of conventional CVD.

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Advanced Engineering Ceramics and Composites

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Periodical:

Key Engineering Materials (Volume 484)

Pages:

183-187

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.484.183

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Online since:

July 2011

Authors:

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Keywords:

High Deposition Rate, Laser Chemical Deposition, Ternary Phase Diagram, YBCO Film

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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