Ternary Phase Relation on Preparation of YBa2Cu3O7-δ Films by Laser CVD
c-axis-oriented YBa2Cu3O7- films were prepared by laser chemical vapor deposition (laser CVD) using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. YBa2Cu3O7- film almost in a single phase and that with different second phases of BaCuO2, CuBaO2, BaY2O4, CuYO2, Y2O3 and CuO were obtained by varying evaporation temperature of precursors. Ternary phase diagram as a function of evaporation amount of three precursors were obtained. The deposition rate of the c-axis-oriented YBCO film was 60 µmh-1, about 60–600 times higher than those of conventional CVD.
Takashi Goto, Yi-Bing Cheng and Takashi Akatsu
P. Zhao et al., "Ternary Phase Relation on Preparation of YBa2Cu3O7-δ Films by Laser CVD", Key Engineering Materials, Vol. 484, pp. 183-187, 2011