Preparation of α-Al₂O₃/TiN Multilayer Coating on Ti(C,N)-Based Cermet by Laser CVD

Abstract:

α-Al2O3 and α-Al2O3/TiN multilayer films were prepared on Ti(C,N)-based cermet substrate by laser chemical vapor deposition.α-Al2O3 and NaCl-type TiN films were prepared at Tdep = 1148 K. α-Al2O3/TiN multilayer film showed dense structure of cross section, and its surface morphology consisted of aggregated spherical grains. The adhesion of α-Al2O3/TiN multilayer film prepared on Ti(C,N)-based cermet was higher as compared with α-Al2O3 film directly prepared on the cermet.

• Periodical: Key Engineering Materials (Volume 484)
• Pages: 188-191
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.484.188
• Online since: July 2011
• Authors: Yu You, Akihiko Ito, Rong Tu, Takashi Goto
• Keywords: Adhesion, Alumina Coating, Laser CVD, Ti(c,n)-based Cermet

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