Recently, there has been a huge interest in application of thermal spraying processes to apply a protective layer on the surface of engineering components. Thermal spraying as a near net shape forming technique has also found applications in manufacturing of advanced engineering components. Spraying methods such as High Velocity Oxygen Fuel (HVOF), Vacuum Plasma Spraying (VPS), and Air Plasma Spraying (APS) are among the most commonly used deposition techniques. Coatings are built up from impact of molten particles on the substrate surface and their flattening and solidification (splat formation). Deposition of millions of individual splats connected to each other at different layers will result in a lamellae type structure. This is a typical example of an anisotropic microstructure. The microstructural features such as porosity, oxide layers define the physical and mechanical properties of coating material. This study investigates the influence of substrate temperature on microstructural characteristics of APS deposited superalloy 625 on steel substrate. The coatings were deposited on substrates at different temperatures. The porosity level was measured using prosimetry. Both image analysis technique and Electron Probe Microanalysis (EPMA) was used to measure the amount of oxide phase. The results indicated that lower substrate temperature results in lower oxide in microstructure. There has been no significant change in porosity level due to substrate temperature.