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Co-Doped ZnO Transparent Conductive Films for LCD and UV Detectors

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Abstract:

Zr,Ga co-doped ZnO transparent conductive films were deposited on glass substrates by DC magnetron sputtering at room temperature.The influence of sputtering pressure on the structural,electrical,and optical properties of Zr,Ga co-doped ZnO films was investigated by X-ray diffraction,scanning electron microscopy (SEM),digital four-point probe,and optical transmission spectroscopy.The lowest resistivity of the Zr,Ga co-doped ZnO film is 3.01×10-4Ω﹒cm.All the films present a high transmittance of above 91% in the visible range.These results make the possibility for liquid crystal display (LCD) and UV photoconductive detectors.

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Periodical:

Key Engineering Materials (Volume 500)

Pages:

226-230

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.500.226

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Online since:

January 2012

Authors:

Yu Zhen Yuan, Hui Wang

Keywords:

Co-Doped, DC Magnetron Sputtering, Optical Property, Transparent Conductive Oxide, ZnO Detector, ZnO Film

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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