Co-Doped ZnO Transparent Conductive Films for LCD and UV Detectors

Abstract:

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Zr,Ga co-doped ZnO transparent conductive films were deposited on glass substrates by DC magnetron sputtering at room temperature.The influence of sputtering pressure on the structural,electrical,and optical properties of Zr,Ga co-doped ZnO films was investigated by X-ray diffraction,scanning electron microscopy (SEM),digital four-point probe,and optical transmission spectroscopy.The lowest resistivity of the Zr,Ga co-doped ZnO film is 3.01×10-4Ω﹒cm.All the films present a high transmittance of above 91% in the visible range.These results make the possibility for liquid crystal display (LCD) and UV photoconductive detectors.

Info:

Periodical:

Edited by:

David Wang

Pages:

226-230

DOI:

10.4028/www.scientific.net/KEM.500.226

Citation:

Y. Z. Yuan and H. Wang, "Co-Doped ZnO Transparent Conductive Films for LCD and UV Detectors", Key Engineering Materials, Vol. 500, pp. 226-230, 2012

Online since:

January 2012

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Price:

$35.00

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