Design and Simulation of Micro-Power Generator Based on Piezoelectric Effect for MEMS Devices Applications

Abstract:

Piezoelectric thin films cantilevers with a central Si mass are designed for harvesting vibration energy applications. Through the theoretic analyzer and MATLAB simulation, the displacement, resonance frequency and maximum stress dependent of the different structure parameters of micro-power device are obtained. It shows that increasing the quality of mass and the length of microcantilever, decreasing the width and thickness of microcantilever can realize the low-frequency resonance and maximum power in actual design. The static and mode analysis of the theory model are done by using Ansys 11.0. The results can provide guidance for the design and fabrication process of micro power generator.

• Periodical: Key Engineering Materials (Volume 503)
• Pages: 369-374
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.503.369
• Online since: February 2012
• Authors: Xiu Jian Chou, Ya Ting Zhang, Mao Xiang Guo, Tao Guo, Ji Jun Xiong
• Keywords: Micro-Power, PZT, Resonance Frequency, Vibration Energy

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