Densification of ATO Nanoceramics by Spark Plasma Sintering

Xue Ping Li; Fei Chen; Qiang Shen; An Xue Wang; Lian Meng Zhang

doi:10.4028/www.scientific.net/KEM.508.230

Paper Titles

Effect of Sb₂O₃ Doping Ratio on Electrical and Optical Properties of ATO Films by Pulsed Laser Deposition
p.211

Comprehensive Approach for the Construction of New Material for Electronic Multipliers
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Growth of Heavily Indium Doped Si Crystals by Co-Doping of Neutral Impurity Carbon or Germanium
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Nd³⁺ Doped LiCaAIF₆ Single Crystal for Scintillator Application
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Densification of ATO Nanoceramics by Spark Plasma Sintering
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Optical and Scintillation Properties of Eu-Doped Calcium Orthoborate
p.235

Crystal Growth and Scintillation Properties of Ce³⁺ and Mg²⁺ Co-Doped LiCaAlF₆ Single Crystal
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Study on Phase Diagram of Ca₃NbGa₃Si₂O₁₄ Piezoelectric Material by Differential Thermal Analysis and X-Ray Diffraction Measurement
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Preparation of Bi_3.6Ho_0.4Ti₃O₁₂ Ceramics by Hot-Press Sintering
p.253

HomeKey Engineering MaterialsKey Engineering Materials Vol. 508Densification of ATO Nanoceramics by Spark Plasma...

Densification of ATO Nanoceramics by Spark Plasma Sintering

Abstract:

High Density Antimony-Doped Tin Oxide (ATO) Ceramic Targets Are the Crucial Materials for Preparation of High Quality Transparent Conductive ATO Thin Films in Sputtering Process. In the Present Work, ATO Nanopowders with Different Sb₂O₃ Doping Content (0~10 mol%) Were Used to Fabricate the ATO Nanoceramics by Spark Plasma Sintering (SPS) Technique, which Can Reduce the Densification Temperature and Restrain a Grain Growth. And the Effect of Sb₂O₃ Doping Content (0~10 mol%) on the Density and Microstructure Had Been Investigated. the Results Showed that with the Sb2o3 Doping Content Increase, the Relative Density of ATO Nanoceramics Is Increased and the Resistivity Is Decreased. When the Sb₂O₃ Doping Content Is 10 mol%, the Relative Density Is 97.2% and the Resistivity Is 7.9×10^-2 Ω•cm.

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Key Engineering Materials (Volume 508)

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230-234

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.508.230

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Online since:

March 2012

Authors:

Xue Ping Li, Fei Chen, Qiang Shen, An Xue Wang, Lian Meng Zhang

Keywords:

ATO Nanoceramics, Density, Sb₂O₃ Doping Content, Spark Plasma Sintering (SPS)

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