The Synthesis of TiO2 Nanoarray Films on Glass Substrate by Anodic Oxidation Method

Xiao Yan Zhu; Xiao Qiang Wang; Jing Guo; Yue Liu Li

doi:10.4028/www.scientific.net/KEM.512-515.1507

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 512-515The Synthesis of TiO2 Nanoarray Films on Glass...

The Synthesis of TiO₂ Nanoarray Films on Glass Substrate by Anodic Oxidation Method

Abstract:

In this work, titanium films , 500nm thick, are rf sputtered onto glass substrates held at 500°C. The resulting films are then anodized at a constant potential in an electrolyte using a platinum counter electrode. Ti films were synthesized by RF magnetron sputtering on glass substrates. The anodizaton process resulted in the formation of titania nanoarrays. The samples are annealed at different temperature to induce crystallinity. XRD results indicated that the optimal annealing temperature is 500°C, the film is anastasia phases. Atomic force microscope (AFM) show that the microstructure is nanoporous pillar array. The AFM depth is about 21nm. The roughness average (Ra) of films is about 1~3nm. Then the TiO₂ nanoarry film is integrated into DSCs structure, and I-V Characteristic of cell is studied preliminarily.

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Key Engineering Materials (Volumes 512-515)

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1507-1510

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https://doi.org/10.4028/www.scientific.net/KEM.512-515.1507

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Online since:

June 2012

Authors:

Xiao Yan Zhu, Xiao Qiang Wang, Jing Guo, Yue Liu Li

Keywords:

Anodic Oxidation, Dye Sensitized Solar Cell (DSSC), RF Magnetron Sputtering, TiO₂ Nanoarrays

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