Study on Parameters of MEMS Accelerometer

Abstract:

An accelerometer is a micro- electromechanical device which can sensitive to acceleration . The sensing mechanism of accelerometer is that when accelerated , the mass moves in Z-axis, and the gap between parallel plates changed with the loads, which causes vary of the capacitance of the estimation. This paper presents a newly devel oped sensor for the conventional capacitive MEMS accelerometer in Z-axis . The principle of capacitive acceleration is based on the detection the change of capacitance which results from acceleration changes. The sensor is used for estimation of the size a nd loads variations for accelerometer. This paper has been focused on the design of the MEMS accelerometer and calculation of the major parameters of the sensor.

• Periodical: Key Engineering Materials (Volumes 531-532)
• Pages: 496-499
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.531-532.496
• Online since: December 2012
• Authors: Shu Min Ma, Chao Chen, Tao Wang, Huan Zhang, Hong Xi Zhou
• Keywords: Accelerometer, Cantilever Beam, Capacitive, Coefficient of Elasticity, Damping Ratio, Mass, Natural Frequency, Quality Factor

References

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