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HomeKey Engineering MaterialsKey Engineering Materials Vol. 537Hardness and Wear Resistance of Ti-B-C-N...

Hardness and Wear Resistance of Ti-B-C-N Nanocomposite Coatings Synthesized by Multi-Target Magnetron Co-Sputtering

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Abstract:

Ti-B-C-N nanocomposite coatings were synthesized on Si(100) and stainless steel substrate by Multi-target Magnetron Co-sputtering. X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS) were employed to measure the structure and chemical states of the coatings. The measurements of nanoindenter and multi-functional tester indicated that the maximum hardness and elastic modulus were 42.8 GPa and 424 GPa when the work pressure was 0.5 Pa, the powers of Ti target and B₄C were 60 and 150 W, the flows of N₂ and Ar were 4 and 36 sccm, and the substrate bias was -100 V.

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Periodical:

Key Engineering Materials (Volume 537)

Pages:

63-66

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.537.63

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Online since:

January 2013

Authors:

C.K. Gao, Meng Yin Liu, D.J. Li, Lei Dong, Han Qing Gu, Rong Xin Wan

Keywords:

Deposition Parameter, Hardness, Multi-Target Magnetron Co-Sputtering, Nanocomposite, Ti-B-C-N Coating

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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