Antireflection and Scattering Properties of Two-Dimensional Hexagonal AZO Gratings on Glass Substrates

Abstract:

With photoresist dot arrays fabricated by a two-beam interference lithography as an etch mask, two-dimensional (2-D) hexagonal aluminum-doped zinc oxide（AZO）submicron gratings (SMG) with 160nm height (h) and different periods (P) were produced using lift-off transfer process. Results show that as P decreased to 487nm, SMG exhibited excellent antireflection properties, which reduced the average total reflectivity (Rtotal) from 11.8% of AZO thin film to 4.7% in the wavelength range of 400nm-1050nm, and promoted the total transmittance (Ttotal) significantly, especially in the long spectral range of 750nm-1050nm. On the other hand, as P increased from 487nm to 985nm, the haze parameters of reflectance (HR) or transmittance (HT) improved from 25.5% to 40.2% or from 15.1% to 36.8%, respectively. Nevertheless, P increased from 985nm to 1435nm, both Rtotal (or Ttotal) and HR (or HT) varied very slightly. Bidirectional distribution functions at normal incidence not only verified that the larger the P was, the part of diffuse reflectance (or transmittance) were much higher, but also further demonstrate the larger the P, the smaller the diffaction angle. In summary, 2-D hexagonal AZO SMG show promising antireflection effects at P less than 487nm, and show promising scattering abilities at P about 985nm.

• Periodical: Key Engineering Materials (Volume 538)
• Pages: 337-340
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.538.337
• Online since: January 2013
• Authors: Ren Chen Liu, Yong Gang Wu, Zi Huan Xia
• Keywords: Aluminum-Doped Zinc Oxide, Antireflection Properties, Two-Dimensional Gratings

References

[1] C. Major, A. Nemeth, G. Randoczi, et al: Appl Surf Sci. Vol. 255(2009), p.8907

[2] M. Berginski, J. Hüpkes, M. Schulte, et al: J. Appl. Phys. Vol.101(2007), pp.074903-1.

[3] C. Haase, H. Stiebig: Prog Photovolt Res Appl, Vol. 14(200), p.629.

[4] J. W. Leem, Y. Min. Song, J. S. Yu: Nanotechnology, Vol.22 (2011), p.485304.

[5] Q. Xie, M.H. Hong, H.L. Tan, et al: Journal of Alloys and Compounds. Vol. 449 (2008) , p.261.

[6] R.C. Liu, Y.G.Wu, Z.H. Xia, et al: Acta Optica Sinica. Vol. 32 (2012) , p.0731001.

[7] M. C. Hutley: J. Mod. Opt. Vol. 37(1990), p.253.

[8] V. Berger, O. Gauthier-Lafaye, E. Costard: J. Appl. Phys. Vol. 82(1997), p.60.