Evaluation of the Polarization State of Integrated Piezoelectric Sensors and Actuators Using the Thermal Wave Method

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In this work, we investigate the polarization state of a Low-Temperature-Cofired-Ceramics (LTCC)/PZT sensor-actuator and a Macro-Fiber Composite (MFC) actuator. An analytical solution for a 1-D thermal problem was derived for an embedded piezoelectric plate. Transient thermal analysis of the more complicated MFC actuator was performed using finite element modelling. At modulation frequencies below 10 Hz both modules are well described by a harmonically heated piezoelectric plate exhibiting heat losses to the environment.

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503-506

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March 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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[1] URL: http: /www. pt-piesa. tu-chemnitz. de (23. 04. 2012).

Google Scholar

[2] S. B. Lang, D. K. Das-Gupta, Laser-intensity-modulation method: A technique for determination of spatial distribution and space charge in polymer electrets, Journal of Applied Physics, 1986, vol. 59, no. 6, pp.2152-2160.

DOI: 10.1063/1.336352

Google Scholar

[3] S. B. Lang, D. K. Das-Gupta, A technique for determination of spatial distribution in thin polymer electrets using periodic heating, Ferroelectrics, 1981, vol. 39, pp.1249-1252.

DOI: 10.1080/00150198108219626

Google Scholar

[4] M. Flössel, S. Gebhardt, A. Schönecker, A. Michaelis, Development of a novel sensor-actuator-module with ceramic multilayer technology, J. Ceram. Sci. Technol., 2010, vol. 1(1), pp.55-58.

Google Scholar

[5] H.S. Carslaw, J.C. Jaeger, Conduction of Heat in Solids, 2nd ed. New York: Oxford Univ. Press; (1959).

Google Scholar

[6] S. Bauer, B. Ploss, A method for the measurement of the thermal, dielectric, and pyroelectric properties of thin films and their applications for integrated heat sensors, J. Appl. Phys., 1990, vol. 68, pp.6361-6367.

DOI: 10.1063/1.346882

Google Scholar

[7] URL: www. ansys. com (08. 05. 2012).

Google Scholar

[8] URL: www. keramverband. de/keramik/deutsch/pressetexte/press01-00-T4. html (11. 05. 2012).

Google Scholar

[9] R. Köhler, N. Neumann, N. Heß, R. Bruchhaus, W. Wersing, M. Simon, Pyroelectric devices based on sputtered PZT thin films, Ferroelectrics, 1997, vol. 201, pp.83-92.

DOI: 10.1080/00150199708228356

Google Scholar

[10] URL: www. yutopian. com/Yuan/prop/Epoxy. html (11. 05. 2012).

Google Scholar

[11] URL: www. kupfer-institut. de/front_frame/pdf/Cu-DHP. pdf (11. 05. 2012).

Google Scholar

[12] URL: www. lexolino. de/c, wissenschaft_chemie_periodensystem, nickel (11. 05. 2012).

Google Scholar

[13] DuPont: Kapton HN, Polyimide Film. Technical Data Sheet.

Google Scholar

[14] R. L. Peterson, G. W. Day, P. M. Gruzensky, R. J. Phelan, Analysis of response of pyroelectric optical detectors, J. Appl. Phys., 1974, vol. 45, pp.3296-3303.

DOI: 10.1063/1.1663775

Google Scholar

[15] O. V. Malyshkina, A. A. Movchikova, G. Suchaneck, A new method for determining the coordinate dependences of the pyroelectric current in ferroelectric materials, Physics of the Solid State, 2007, vol. 49, pp.2144-2147.

DOI: 10.1134/s1063783407110212

Google Scholar