Design and Simulation of High Efficient MEMS Electrothermal Actuator

Rong Chang Song; Gui Lei Wang; Jun Bo Wang; Yue Yue Shen; Chao Lv

doi:10.4028/www.scientific.net/KEM.562-565.504

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Design and Simulation of High Efficient MEMS...

Design and Simulation of High Efficient MEMS Electrothermal Actuator

Abstract:

The paper mainly designs an efficient MEMS electrothermal actuator, with lower voltage input but large displacement output. The calculation method of the actuator considers the convection and radiation besides heat conduction mentioned in most literatures. With the multiphysics simulation by the software Comsol of electrothermal bimorph actuator, the transient effects of thermal convection and thermal radiation on the actuator displacement and the response characteristics of an actuator with a separate heating layer were studied.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

504-508

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.504

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Online since:

July 2013

Authors:

Rong Chang Song, Gui Lei Wang, Jun Bo Wang, Yue Yue Shen, Chao Lv

Keywords:

Design, Electrothermal Actuator, MEMS, Multiphysics, Simulation

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