Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending

Wen Chao Tian; Yin Tang Yang

doi:10.4028/www.scientific.net/KEM.562-565.522

Paper Titles

Design of Screw Wheel Micro In-Pipe Robot Control System
p.499

Design and Simulation of High Efficient MEMS Electrothermal Actuator
p.504

Parametric Identification of Bouc-Wen Hysteresis Model for Piezoelectric Ceramic Actuator Based on Immune Particle Swarm Optimization Algorithm
p.509

Bouc-Wen Model Parameter Identification for Piezoelectric Actuator Using Chaos Particle Swarm Optimization
p.516

Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending
p.522

Performance Comparison of Typical Electrothermal Actuators
p.528

Photothermal Microactuators Fabricated by LIGA Technology
p.534

Preparation of Graphene-Containing Composite Film and the Research on its Thermal Conductivity
p.538

Preparation of In₂O₃/MWCNTs Nanocomposites and their Gas-Sensing Property to Ethanol
p.543

HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Analysis of an Electrostatic Micro-Actuator Based...

Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending

Abstract:

For the problems of the oversized voltage and undersized displacement in the electrostatic micro actuator of transverse loading recently, a silicon micro actuator model with characteristics of large-displacement and low-voltage is presented based on the principle of vertically-horizontally bending. The deflection equation of the micro actuator is derived. The axial static electricity, temperature stress and axial squeezing pressure on the deformation of micro-beam are analyzed. The simulation shows that the displacement is as big as 17.5μm when the driving voltage is as low as 5V. The displacement is much larger than the deformation of the current micro actuator.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

522-527

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.522

Citation:

Cite this paper

Online since:

July 2013

Authors:

Wen Chao Tian, Yin Tang Yang

Keywords:

Deflection Equation, MEMS, Micro-Actuator, Vertically-Horizontally Bending

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] J. Zhao, J.Y. Jia, H.X. Wang, W.B. Zhang. Nonlinear snap-through characteristic of a compressed bi-stable buckled beam．Journal of Xidian University, 34(2007) 458-462.

Google Scholar

[2] Y. Yu, W. Yuan, D. Qiao, Electromechanical characterization of a new micro programmable blazed grating by laser Doppler vibrometry (LDV), Microsystem Technology,15(2009) 853-858.

DOI: 10.1007/s00542-009-0835-0

Google Scholar

[3] K. Laszczyk, S. Bargiel, C. Gorecki and J. Krężel, A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications, Sensors and Actuators A,163(2010)255-265.

DOI: 10.1016/j.sna.2010.06.020

Google Scholar

[4] A. Samy and E. David，Experimental validation of electromechanical buckling, Journal of Micro electromechanical Systems,15(2006)1656-1672.

Google Scholar