Performance Comparison of Typical Electrothermal Actuators

Ling Zhou; Xue Jin Shen; Zhen Lu Wang; Yi Hu

doi:10.4028/www.scientific.net/KEM.562-565.528

Paper Titles

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Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending
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Performance Comparison of Typical Electrothermal Actuators
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Preparation of Graphene-Containing Composite Film and the Research on its Thermal Conductivity
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Preparation of In₂O₃/MWCNTs Nanocomposites and their Gas-Sensing Property to Ethanol
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Research on MEMS Based Real-Time Measurement System for Motion Information of the Vehicle
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Performance Comparison of Typical Electrothermal...

Performance Comparison of Typical Electrothermal Actuators

Abstract:

As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of energy, motion and force producing. In this paper, the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each other and analyze mechanical performance. For Π-shaped actuators, the tip displacements are proportional to temperature increment and length, having no relationship with the beam width and thickness. However, the displacement of Π-shaped actuators is smaller than the one of V-shaped actuators with the same parameters. For V-shaped actuators, the tip displacements of cascaded V-shaped actuators are larger than the ones of single V-shaped actuators with the same parameters. Especially, cascaded V-shaped actuator with secondary beam having no current has the largest displacement.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

528-533

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.528

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Online since:

July 2013

Authors:

Ling Zhou, Xue Jin Shen, Zhen Lu Wang, Yi Hu

Keywords:

Cascaded V-Shaped Actuator, MEMS, Single V-Shaped Actuator, Π-Shaped Actuator

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