Characteristic Research of SOI Rib Waveguide Resonators with SiO2 Deposited

Jun Bin Zang; Chen Yang Xue; Li Ping Wei; Yong Hua Wang; Dan Feng Cui; Wen Dong Zhang

doi:10.4028/www.scientific.net/KEM.562-565.727

Paper Titles

The Study of Correlations among Parameters in Electrohydrodynamics Micro-Jet Printing System
p.701

A Parallel Computing Dynamic Task Scheduling System for Nano-Materials Design and Simulation
p.709

The Preparation of Size-Controlled Antimony Nanoparticles by Electrochemical Method
p.716

Analytical Method for Calculating Curvature of Circular Silicon Wafer Caused by Boron Doping
p.721

Characteristic Research of SOI Rib Waveguide Resonators with SiO₂ Deposited
p.727

Charge Storage Characteristics of Ni-NiO_x Core-Shell Nanocrystals Embedded in SiO₂ Gate Oxide
p.731

Color Filters Based on the Subwavelength Triangular-Lattice Cylinder Arrays in Metal-Dielectric Films
p.737

Combined Torsional Buckling of Carbon Nanotubes Subjected to Thermo-Electro-Mechanical Loadings with Consideration of Scale Effect
p.744

Composite Content Influence on Multiwall Carbon Nanotubes-SiO₂ Film Humidity Sensors at AC Testing
p.750

HomeKey Engineering MaterialsKey Engineering Materials Vols. 562-565Characteristic Research of SOI Rib Waveguide...

Characteristic Research of SOI Rib Waveguide Resonators with SiO₂ Deposited

Abstract:

With the extensive research and application of SOI nano-optical ring resonators, the problem of high integration becomes the bottleneck restricting its development. To research the effect of deposited SiO2 insulating layer on the resonance characteristic of SOI nano-waveguid ring cavity while integrating, a rib waveguide ring resonator with 500nm SiO2 insulating layer deposited was designed and fabricated in this paper. By testing the resonance transmission spectrum power of this structure, it is found that SiO2 insulating layer deposited has no effect on the grating vertical coupling efficiency while improves the quality factor to 14.000±1.000.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

727-730

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.727

Citation:

Cite this paper

Online since:

July 2013

Authors:

Jun Bin Zang, Chen Yang Xue, Li Ping Wei, Yong Hua Wang, Dan Feng Cui, Wen Dong Zhang

Keywords:

Microring Resonator, Rib Nano-Waveguides, Silicon-on-Insulator (SOI)

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Qingzhong Huang, Yude Yu, Jinzhong Yu. Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator[J], Optics Communications, 2009, 282: 22-26

DOI: 10.1016/j.optcom.2008.09.052

Google Scholar

[2] Wolfram H.P. Pernice, Chi Xiong, Hong X. Tang. High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics[J], Optics Express, 2012 , 20(11): 12261-12269

DOI: 10.1364/oe.20.012261

Google Scholar

[3] Lian-Wee Luo, Gustavo S. Wiederhecker, Jaime Cardenas,et al. High quality factor etchless silicon photonic ring resonators[J], OPTICS EXPRESS,2011, 19(7):6284-6289

DOI: 10.1364/oe.19.006284

Google Scholar

[4] Qingzhong Huang, Jinzhong Yu, Shaowu Chen, Xuejun Xu,et al. High Q microring resonator in silicon-on-insulator rib waveguide[J], Proc. of SPIE,2007,6838: 68380J-1-68380J-6

Google Scholar

[5] Fengnian Xia, Mike Rooks,et al. Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects[J], OPTICS EXPRESS, 2007. 15(19): 11934-11941

DOI: 10.1364/oe.15.011934

Google Scholar

[6] Kyle Preston,Sasikanth Manipatruni,Alexander Gondarenko. Deposited silicon high-speed integrated electro-optic modulator[J], OPTICS EXPRESS, 2009, 17( 7):5118-5124

DOI: 10.1364/oe.17.005118

Google Scholar

[7] Ling T, Chen SL, Guo LJ. Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector[J], Optics Express, 2011,19(2):861-869

DOI: 10.1364/oe.19.000861

Google Scholar

[8] Y.Henry Wen, Onur Kuzucu,et al. All-Optical Control of an Individual Resonance in a Silicon Microresonator[J], PHYSICAL REVIEW LETTERS,2012,223907:1-5

Google Scholar

[9] J.M. Choi, R.K. Lee, and A.Yariv. Control of critical coupling in a ring resonator-fiber configuration: application to wavelength-selective switching, modulation, amplification, and oscillation[J], Opt. Lett. 2001, 26: 1236-1238

DOI: 10.1364/ol.26.001236

Google Scholar