Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

Abstract:

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (T_S) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with T_S, was the coexistence of Cr, Cr₂N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

• Periodical: Key Engineering Materials (Volume 591)
• Pages: 190-193
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.591.190
• Online since: November 2013
• Authors: Hao Zhang, Shu Wang Duo, Xiang Min Xu, Ting Zhi Liu
• Keywords: CFUMS, CrN Coatings, Substrate Temperature

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