Investigation of a New High Sensitive Micro-Electromechanical Strain Gauge Sensor Based on Graphene Piezoresistivity

Mohammed Gamil; Osamu Tabata; Koichi Nakamura; Ahmed M.R. Fath El-Bab; Ahmed Abd El-Moneim

doi:10.4028/www.scientific.net/KEM.605.207

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Preparation and Selectivity of Resistive Acetone Gas Sensors Based on Polyaniline/Au Interdigitated Electrode
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Investigation of a New High Sensitive Micro-Electromechanical Strain Gauge Sensor Based on Graphene Piezoresistivity
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 605Investigation of a New High Sensitive...

Investigation of a New High Sensitive Micro-Electromechanical Strain Gauge Sensor Based on Graphene Piezoresistivity

Abstract:

A new strain gauge based on graphene piezoresistivity was fabricated by a novel low cost technique which suits mass production of micro piezoresistor sensors. The strain gauge consists of a monolayer graphene film made by chemical vapor deposition on a copper foil surface, and transferred to Si/SiO₂ surface by using a polymethyl-methacrylate (PMMA) assisted transfer method. The film is shaped by laser machine to work as a conductive-piezoresistive material between two deposited electrical silver electrodes. This method of fabrication provides a high productivity due to the homogeneous distribution of the graphene monolayer all over the Si/SiO₂ surface. The experimentally measured gauge factor of graphene based device is 255, which promises a new strain gauge sensor of high sensitivity.

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Materials and Applications for Sensors and Transducers III

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Periodical:

Key Engineering Materials (Volume 605)

Pages:

207-210

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.605.207

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Online since:

April 2014

Authors:

Mohammed Gamil, Osamu Tabata, Koichi Nakamura, Ahmed M.R. Fath El-Bab, Ahmed Abd El-Moneim

Keywords:

Gauge Factor, Graphene, MEMS Devices, Piezoresistive Sensors, Strain Gauge

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