Fabrication of Diamond Based Quartz Crystal Microbalance Gas Sensor

Abstract:

Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications (sensors, heat sink, optical mirrors, cold cathode, tissue engineering, etc.). Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures (800900 °C), what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a nanocrystalline diamond (NCD) growth from the H₂/CH₄/CO₂ gas mixture at low temperature (400 °C) by pulsed linear antenna microwave plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia (NH₃) at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor, but in addition its sensitivity was twofold to a virgin QCM sensor with a gold active layer.

• Periodical: Key Engineering Materials (Volume 605)
• Pages: 589-592
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.605.589
• Online since: April 2014
• Authors: Marián Varga*, Alexandr Laposa, Pavel Kulha, Marina Davydova, Jiri Kroutil, Miroslav Husak, Alexander Kromka
• Keywords: Diamond Thin Film, Gas Sensor, Low Temperature Deposition, Quartz Crystal Microbalance

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