Nanohardness of CrN Coatings versus Deposition Parameters

Abstract:

Nanohardness of chromium nitrid coatings deposited with DC magnetron from Cr target in the reactive atmosphere with various percentual contribution of nitrogen in Ar flow was investigated to determine the influence of nitrogen content and negative bias. The nanohardness of pure Cr coating was between 11 14 GPa and the addition of 50 % of nitrogen into Ar flow resulted in the increase of coating hardness up to ~ 22 GPa. The highest hardness of the studied CrN coatings of ~ 28 GPa was achieved at 700 W power, working pressure of 0.5 Pa with 50 % of nitrogen in Ar flow and negative bias of-30 V . The increase was ascribed to the formation of near-stoichiometric CrN compounds.

• Periodical: Key Engineering Materials (Volume 606)
• Pages: 191-194
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.606.191
• Online since: March 2014
• Authors: Petra Hviščová*, František Lofaj, Michal Novák
• Keywords: CrN Coatings, DC Magnetron Sputtering, Nanohardness, Nitrogen Content

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