Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror

Chi Zhang

doi:10.4028/www.scientific.net/KEM.609-610.1165

Paper Titles

A Novel Noise Reduction Algorithm of MEMS Gyroscope Based on Compressive Sensing and Lifting Wavelet Transform
p.1138

Micro-Machined Gyroscope Mathematical Model and Error Analysis
p.1144

Finite Element Analysis on Thermosonic Ball Bonding Process of MEMS Chip
p.1153

Lateral Resolution Test for Confocal Laser Scanning Microscope
p.1159

Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror
p.1165

Tightness Detecting Technique for the Valves of Diaphragm Gas Meter Based on Chromatic Confocal Method
p.1170

Design of Third-Order Single-Loop Full Feed-Forward Sigma Delta Modulator
p.1176

Quartz Crystal Double-Ended Tuning Fork Resonator for High Resolution Force Sensing
p.1181

Rapid Temperature Measurement of Meteorological Detection System Based on MEMS
p.1185

HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610Fabrication and Packaging of Electromagnetic 2D...

Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror

Abstract:

The scanning mirror has two gimbals structure, which are supported perpendicularly to each other by torsion beams. Dual-axis movement of the mirror is achieved by the tilt of inner and outer structures, respectively. The electromagnetic 2D MEMS scanning mirror is fabricated using a bulk silicon process, mainly including the wet etching, electroplating and ICP dry etching process. The permanent magnets are packaged together with the electromagnetic 2D MEMS scanning mirror in a compact size of 18×28×28mm³. The electromagnetic 2D MEMS scanning mirror has advantages of small volume, low voltage and high frequency, which has a broad application in sensor networks, target detection and optical imaging.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

1165-1169

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.1165

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Online since:

April 2014

Authors:

Chi Zhang*

Keywords:

Electromagnetic, MEMS, Packaging, Scanning Mirror

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* - Corresponding Author

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