Graphene Synthesis on Specified Location

Abstract:

The synthesis of graphene using chemical vapor deposition (CVD) on patterned Cu thin films was studied. A series of experiments were carried out to optimize the CVD process of graphene synthesis on Cu thin films and the optimal growth conditions were obtained. Consequently, few-layer graphene which had been characterized by optical microscopy and Raman spectroscopy atomic was synthesized. Conductive atomic force microscopy (AFM) was used to measure the conductivity of metal-graphene contact samples and the result showed that the conductivity of CVD synthesized graphene on Cu thin films is higher than the transferred graphene on same Cu thin films, which was synthesized on 25 μm Cu foils by conventional CVD method.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 159-164
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.159
• Online since: April 2014
• Authors: Han Zhang, Chen Xu Zhao, Xin Guo, Yan Wu Lu, Ze Wen Liu*
• Keywords: CVD, Graphene, ORCA, Patterned, Thin Film

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