The Fabrication of Trans-Scale Micro-Fuze Safety Device

Abstract:

Fuze Micro-Electro-Mechanical System (MEMS) has become a popular subject in recent years. Studies have been done for the application of MEMS-based fuze safety and arm devices. The existing researches mainly focused on reducing the cost and volume of the fuze safety device. The reduction in volume allows more payloads and, thus, makes small-caliber rounds more effective and the weapon system more affordable. At present, MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion etching (DRIE) or LIGA technology, and the fabrication process research on the fuze MEMS safety device is in the exploring stage. In this paper, a new trans-scale fabrication method of metal-based fuze MEMS safety device is presented based on UV-LIGA technology and the micro Wire-cut Electrical Discharge Machining (WEDM). The method consists of fabrication of micro-spring by UV-LIGA technology, the fabrication of mesoscale structure by WEDM, the micro assembly of micro spring and mesoscale structure. Because UV-LIGA technology and WEDM technology were introduced, the production cycle was shortened and the cost was reduced. The overall dimension of the micro-fuse safety device is 9.5×12.3×0.6 mm and the smallest dimension is 10μm. Besides, four problems in the fabrication process have been solved effectively, which is helpful for the fabrication of similar kinds of micro devices. The fabrication method presented in this paper provides a new option for the development of MEMS fuze.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 796-800
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.796
• Online since: April 2014
• Authors: Li Qun Du*, Ao An Wang, Ming Zhao, Man Cang Song
• Keywords: Metal Micro-Structure, Micro-Fuze Safety Device, Trans-Scale Fabrication, UV-LIGA, Wire-Cut Electric Discharge Machining (WEDM)

References

[1] DU Liqun, JIA Shengfang, NIE Weirong, WANG Qijia, Fabrication of fuze micro-electro- mechanical system safety device[J]. Chinese journal of mechanical engineering, 2011, 24 (5): 836-841.

DOI: 10.3901/cjme.2011.05.836

[2] FENG Pengzhou, ZHU Jinan, WU Zhiliang. Analysis of US typical MEMS fuze safety & arming devices [J]. Journal of detection & Control, 2007, 29 (5): 26–33. (in Chinese).

[3] SHI Gengchen, LI Hua. Study on MEMS safety and arming devices of fuze[J]. Journal of Detection & Control, 2007, 29 (6): 1–5. (in Chinese).

[4] RONINSON C H, WOOD R H, HOANG T Q. Development of inexpensive, ultra-miniature MEMS-based safety and arming(S&A) device for small-caliber munition fuzes[M]. US: Army Tank Automative Command(TACOM) Armament Research, Development and Engineering Center(ARDEC) Fuze Division, (2002).

[5] PEZOUS H, ROSSI C, SANCHEZ M, et al. Fabrication, assembly and test of a MEMS-based safe, arm and fire device[J]. Journal of Physics and Chemistry of Solid, 2010, 71 (2): 75–79.

DOI: 10.1016/j.jpcs.2009.08.018

[6] WANG Shiwei, HAO Yongping, ZHANG Dezhi, et al. The comprehensive analysis of MEMS-based fuze safety and arming device[J]. Journal of Detection & Control, 2006, 28 (6): 55–58. (in Chinese).

[7] DU Liqun, QIN Jiang, LIU Chong, et al. Study on dimension precision of UV-lithography on SU-8 photoresist[J]. Optics and Precision Engineering, 2007, 15 (4): 447–452. (in Chinese).

[8] DU Liqun, LIU Yaping, LI Yonghui, LI Chengbin, Mechanism analysis of ultrasonic treatment on SU-8 swelling in UV-LIGA technology[J]. MICRO & NANO LETTERS, 2011, 6 (11): 900-903.

DOI: 10.1049/mnl.2011.0515

[9] DU Liqun, ZHANG Benzhuang, LIU Yaping, Reducing SU-8 hygroscopic swelling by ultrasonic treatment[J]. Nano-micro letters, 2010, 2 (3): 197-203.

DOI: 10.1007/bf03353641

[10] SONG Mancang, XIE Tingli, DU Liqun, WANG Minjie, LIU Chong, WEDM of meso-scale structure on thin nickel plate[J]. Optics and Precision Engineering, 2013, 21 (7): 1748-1754. (in Chinese).

DOI: 10.3788/ope.20132107.1748