A Readout System Design for LTCC-Based Piezoresistive Accelerometer

Bao Xing Zhou; Yue Xia Zhang; Ru Niu Fang

doi:10.4028/www.scientific.net/KEM.609-610.997

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610A Readout System Design for LTCC-Based...

A Readout System Design for LTCC-Based Piezoresistive Accelerometer

Abstract:

This paper reports a readout system for a piezoresistive accelerometer which is fabricated by LTCC thick-film process technology. The authors first introduce a LTCC compatible design of this new kind of accelerometer, which is based on piezoresistive phenomenon. As the performance of the accelerometer circuitry is affected by temperature, a readout system is introduced for compensating the temperature drift and the non-linearity of this piezoresistive accelerometer by using the MAX1452 processor. The authors give the principles of the temperature compensation and the executive processes. The readout system also includes a ZigBee wireless transmission system and a real-time curve display window. Some tests on the system are carried out and the results manifest that the readout system designed in this paper is workable.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

997-1001

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.997

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Online since:

April 2014

Authors:

Bao Xing Zhou, Yue Xia Zhang*, Ru Niu Fang

Keywords:

Ceramic Micromachining, LTCC, Micro Accelerometer, Readout System

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* - Corresponding Author

References

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