Research for the Resonator Structure Process Technology of Resonant Pressure Sensors

Zheng Yuan Zhang; Yang Cao; Yong Mei; Jian Gen Li; Zhi Cheng Feng

doi:10.4028/www.scientific.net/KEM.609-610.1020

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610Research for the Resonator Structure Process...

Research for the Resonator Structure Process Technology of Resonant Pressure Sensors

Abstract:

The fabrication of butterfly-shape resonator is key for high precision resonator, for requiring suspend on the silicon substrate. This paper is focused on the technology of making butterfly-shape resonator. the variety of structure design can be used to make butterfly-shape resonator have been analyzed, the structure of butterfly-shape resonator is obtained, and for reducing the etch surface roughness, KOH etching conditions, such as composition, concentration, and temperature of etch solution, have been done. Combining with above testing results, the structure design and optimization KOH etching technology are obtained ,based on the technology, using the boron etch stop technique , the silicon butterfly-shape resonator has been done, it can be used effectively in the fabrication of the silicon resonant sensor.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

1020-1022

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.1020

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Online since:

April 2014

Authors:

Zheng Yuan Zhang, Yang Cao, Yong Mei, Jian Gen Li, Zhi Cheng Feng

Keywords:

Butterfly-Shape, Crystallography, Etching, Resonant Sensor

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