Development of a Compact Deformable Mirror Using Push-Pull Actuators

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A small deformable mirror which realizes concave shape as well as convex shape has been developed. In addition, this deformable mirror was developed to realize long term stability. For this purpose, a new push-pull actuator using two multilayered piezoelectric actuators aligned inline was designed. In this process, a practical method for simulating the property of piezoelectric actuator in the finite element method was proposed. From the experimental results, it was confirmed that newly developed deformable mirror has the ability to make complex profiles. Furthermore, efficiency of proposed simulation method was also confirmed.

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200-203

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May 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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