Surface Modification of Silicon Carbide Powder with Silica Coating by Rotary Chemical Vapor Deposition

Abstract:

The surface of silicon carbide (SiC) powder was modified by coating with amorphous silica (SiO₂) using (C₂H₅O₄)Si (tetraethyl orthosilicate: TEOS) as a precursor by rotary chemical vapor deposition (RCVD). With increasing deposition time from 0.9 to 14.4 ks, the mass content of SiO₂ coating increased from 1 to 35 mass%. The SiO₂ mass content had a linear relationship with deposition time from 2.7 to 7.2 ks. The effects of O₂ gas flow, deposition temperature (T_dep), total pressure (P_tot) and precursor vaporization temperature (T_vap) on the SiO₂ yield by RCVD were investigated. At O₂ gas flow of 4.2 × 10^-7 m³ s^-1, T_dep of 948 K, P_tot of 400 Pa and deposition time of 7.2 ks, the maximum SiO₂ yield of 1.82 × 10^-7 kg/s with SiC powder of 4.5 × 10^-3 kg by RCVD was obtained.

• Periodical: Key Engineering Materials (Volume 616)
• Pages: 232-236
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.616.232
• Online since: June 2014
• Authors: Zhen Hua He*, Hirokazu Katsui, Rong Tu, Takashi Goto
• Keywords: Rotary Chemical Vapor Deposition, Silica, Silicon Carbide (SiC), Surface Modification

References

[1] B.O. Dabbousi, J. Rodriguez-Viejo, F.V. Mikulec, J. R. Heine, H. Mattoussi, R. Ober, K.F. Jensen, M.G. Bawendi, (CdSe)ZnS core-shell quantum dots:  synthesis and characterization of a size series of highly luminescent nanocrystallites, J. Phys. Chem. B 101 (1997) 9463-9475.

DOI: 10.1021/jp971091y

[2] L.J. Lauhon, M.S. Gudiksen, D. Wang, C.M. Lieber, Epitaxial core-shell and core-multishell nanowire heterostructures, Nature 420 (2002) 57-61.

DOI: 10.1038/nature01141

[3] D.P. Liu, G.D. Li, Y. Su, J.S. Chen, Highly luminescent ZnO nanocrystals stabilized by ionic-liquid components, Angew. Chem. Int. Ed. 45 (2006) 7370-7373.

DOI: 10.1002/anie.200602429

[4] H. Ow, D.R. Larson, M. Srivastava, B.A. Baird, W.W. Webb, U. Wiesner, Bright and stable core-shell fluorescent silica nanoparticles, Nano Lett. 5 (2005) 113-117.

DOI: 10.1021/nl0482478

[5] J.K. Edwards, B. Solsona, P. Landon, A.F. Carley, A. Herzing, M. Watanabe, C.J. Kielyb, G.J. Hutchings, Direct synthesis of hydrogen peroxide from H2 and O2 using Au–Pd/Fe2O3 catalysts, J. Mater. Chem. 15 (2005) 4595-4600.

DOI: 10.1039/b509542e

[6] D.I. Enache, J.K. Edwards, P. Landon, B. Solsona-Espriu, A.F. Carley, A.A. Herzing, M. Watanabe, C.J. Kiely, D.W. Knight, G.J. Hutchings, Solvent-free oxidation of primary alcohols to aldehydes using Au-Pd/TiO2 catalysts, Science 311 (2006) 362-365.

DOI: 10.1126/science.1120560

[7] J.B. Jackson, S.L. Westcott, L.R. Hirsch, J.L. West, N.J. Halas, Controlling the surface enhanced Raman effect via the nanoshell geometry, Appl. Phys. Lett. 82 (2003) 257-259.

DOI: 10.1063/1.1534916

[8] J.C. Knight, P.S.J. Russell, New ways to guide light, Science 296 (2002) 276-277.

[9] W. Shi, H. Zeng, Y. Sahoo, T.Y. Ohulchanskyy, Y. Ding, Z. Lin Wang, M. Swihart, P.N. Prasad, A general approach to binary and ternary hybrid nanocrystals, Nano Lett. 6 (2006) 875-881.

DOI: 10.1021/nl0600833

[10] J.F. Zhang, R. Tu, T. Goto, Preparation of Ni-precipitated hBN powder by rotary chemical vapor deposition and its consolidation by spark plasma sintering, J. Alloys Compd. 502 (2010) 371-375.

DOI: 10.1016/j.jallcom.2010.04.170

[11] Z.H. He, R. Tu, H. Katsui, T. Goto, Synthesis of SiC/SiO2 core-shell powder by rotary chemical vapor deposition and its consolidation by spark plasma sintering, Ceram. Int. 39 (2013) 2605-2610.

DOI: 10.1016/j.ceramint.2012.09.025

[12] H. Katsuia, Z.H. He, T. Goto, Silicon carbide coating on diamond powder by rotary chemical vapor deposition, Key Eng. Mater. 508 (2012) 65-68.

DOI: 10.4028/www.scientific.net/kem.508.65

[13] A. Boulle, Z. Oudjedi, R. Guinebretiere, B. Soulestin, A. Dauger, Ceramic nanocomposites obtained by sol-gel coating of submicron powders, Acta. Mater. 49 (2001) 811-816.

DOI: 10.1016/s1359-6454(00)00366-9

[14] C. Vahlas, B. Caussat, P. Serp, G.N. Angelopoulos, Principles and applications of CVD powder technology, Mater. Sci. Eng. R 53 (2006) 1-72.

DOI: 10.1016/j.mser.2006.05.001

[15] F. Guillard, A. Allemand, J.D. Lulewicz, J. Galy, Densification of SiC by SPS-effects of time, temperature and pressure, J. Eur. Ceram. Soc. 27 (2007) 2725-2728.

DOI: 10.1016/j.jeurceramsoc.2006.10.005

[16] S. Baud, F. Thevenot, Microstructures and mechanical properties of liquid-phase sintered seeded silicon carbide, Mater. Chem. Phys. 67 (2001) 165-174.

DOI: 10.1016/s0254-0584(00)00435-1

[17] J. F. Zhang, R. Tu, T. Goto, Densification of SiO2-cBN composites by using Ni nanoparticle and SiO2 nanolayer coated cBN powder, Ceram. Int. 38 (2012) 4961-4966.

DOI: 10.1016/j.ceramint.2012.02.090

[18] Z.H. He, H. Katsuia, R. Tu, J. F. Zhang, T. Goto, High hardness and ductile mosaic SiC/SiO2 composite by spark plasma sintering, J. Am. Ceram. Soc. 97 (2014) 681-683.

DOI: 10.1111/jace.12813