On the Temperature-Related Mechanical Properties of UV-LIGA Nickel Material

Shuang Shi Yuan; Guang He; Ming Zhang; Guo Zhong Li

doi:10.4028/www.scientific.net/KEM.645-646.926

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646On the Temperature-Related Mechanical Properties...

On the Temperature-Related Mechanical Properties of UV-LIGA Nickel Material

Abstract:

MEMS nickel material is commonly used for structural material in micro devices. In order to study the effect of environmental temperature on its mechanical properties,this paper has built up a experimental system which can measure the temperature-related static mechanical parameters of the UV-LIGA nickel material. By using the system for uniaxial tensile experiments of the micro specimen under different temperature, the stress-strain curves of the micro specimen under different temperature were obtained; the mechanical parameters of the micro specimen such as elastic modulus, yield stress and failure stress under different temperature were also calculated out;Finally, the relationship between temperature and mechanical parameters including elastic modulus, yield stress and failure stress was analyzed.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

926-930

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.926

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Online since:

May 2015

Authors:

Shuang Shi Yuan, Guang He*, Ming Zhang, Guo Zhong Li

Keywords:

Mechanical Properties, MEMS Nickle Material, Temperature-Related, Uniaxial Tension

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* - Corresponding Author

References

[1] Yi Futing, Research of LIGA Technology, Institute of High Energy physics chinese Academy of Science , (2000).

Google Scholar

[2] Libing Zheng, Gengchen Shi, Material Properties of LIGA Nickel Based on electroformed processing, Functional Materials and Devices Journal[J], 2010: 222-226.

Google Scholar

[3] Bin He, The Development of Micro Tensile Experiment and the Evaluation of the mechanical properties of Micro Structures[D], Harbin Industrial University, (2011).

Google Scholar

[4] Xiaoke Li, Test technology research on the dynamic characteristics of high-temperature environment of MEMS component[D], Dalian University of Technology, (2009).

Google Scholar

[5] Yajun Wang, On the Dynamic Mechanical Characteristics of Typical MEMS Material and Structure in Complex Environment[D], Beijing：Beijing Institute of Technology, (2013).

Google Scholar

[6] Guang He, Geng-chen Shi, On the mechanical behavior of LIGA nickel, C. 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2009), 2009, 758-762.

DOI: 10.1109/nems.2009.5068689

Google Scholar