The Dynamic Characteristics Research of MEMS V-Shaped SiO₂/Al Electrothermal Actuator

Abstract:

Traditional MEMS V-shaped electrothermal actuator is always fabricated with doping polysilicon, which always need a big voltage due to high resistivity of material. A new structure of actuator is proposed, which embeds heating layer, AL, into structural layer, SiO₂. Using the surface silicon technology, the fabrication process of new actuator is built and verified by simulation in Coventorware. Besides, through multiphysics dynamic simulation in Comsol Multiphysics, which takes some material property change with temperature into consideration, effect of structure parameter and input voltage on displacement is studied. The result proves that the new actuator structure can obtain a big displacement under a lower voltage in short time.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 963-967
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.963
• Online since: May 2015
• Authors: Yue Yue Shen*, Rong Chang Song, Hai Mi Tang, Qing Sen Chen, Ping Guan
• Keywords: Dynamic Characteristic, Multiphysics Simulation, Surface Silicon Process, V-Shaped Electrothermal Actuator

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