The Error Analysis of Micro-Flow Self-Sensing Actuator

Abstract:

In this article the micro flow self-sensing actuator has carried on the theoretical analysis and experimental research. Using output micro-displacement generated by the first inverse piezoelectric effect to realize cell micro flow injection, using output voltage generated by secondary direct piezoelectric effect of piezoelectric ceramic to self-sensing the output displacement in the process of the micro flow injection. The experimental results show that the micro-displacement of micro-flow self-sensing actuator has nonlinear error, error is 5.03%. The error between measured micro-displacement and self-sensing micro-displacement is 63.13%. In this paper, the error causes analysis of micro-flow self-sensing actuator is from non-linearity and hysteresis, external factors, it lay the foundation for the further study of micro-flow self-sensing actuator.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 972-979
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.972
• Online since: May 2015
• Authors: Yan Bo Wei, Li Ping Shi*, Hai Zhou
• Keywords: Error Analysis, Hysteresis, Micro-Flow Injection, Nonlinearity, Self-Sensing Actuator

References

[1] Tang Zhaojun. The device fabrication and micro-injection of Automated cell microinjection[D]. Nanjing: Nanjing university of science and technology, 2011: 1-4.

[2] Chen Wei. The research and development of cell micro injection system implementing device[D]. Jilin: Northeastern university, 2010: 1-8.

[3] Nagaki A, Miyazaki A, Tomida Y, et al. Anionic polymerization of alkyl methacrylates using flow microreactor systems[J]. Chemical Engineering Journal, 2010, 7413: 1-8.

DOI: 10.1016/j.cej.2010.07.073

[4] Yu Xie, Dong Sun, Senior Member, IEEE, Chong Liu. Penetration Force Measurement and Control in Robotic Cell Microinjection[C]. The 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems. USA, 2009: 4701-4706.

DOI: 10.1109/iros.2009.5354514

[5] Xiao Xianqiang, Li Xinxin, et al. Research on the device of cell medicine microinjection based on piezoelectric actuator[J]. Machinery Design & Manufacture, 2005, 12: 29-31.

[6] Shi Liping, Sun Lining, Rong Weibin. Application of the first inverse and the secondary direct piezoelectric effect to self-sensing actuators[J]. Nanotechnology and precision engineering, 2010, 8(3): 211-214.

[7] Wei Yanbo, Shi Liping, Wei Xiwen. Research on Micro-flow Self-sensing Actuators based on Piezoelectric Ceramic Stack[J]. Journal of Harbin Institute of Technology (New Series), 2014, 2(21): 99-103.

[8] Shi Liping, Wei Xiwen, Wei Yanbo. Investigation on Nonlinear Analysis and Correction Method of Piezoelectric Sensors and Actuators [J]. 2012 International Conference on Measurement, Information and Control (MIC). 2012, 912-916.

DOI: 10.1109/mic.2012.6273434

[9] Zhang Tao, Sun Lining. The basic characteristic research on piezoelectric ceramic[J]. Optics and Precision Engineering, 1998, 10(6): 26-32.

[10] Shi Liping, Wei Yanbo, Wei Xiwen. The origin and correction of hysteresis nonlinearity on piezoelelctric ceramic[J]. Journal of Heilongjiang Hydraulic Engineering College, 2013, 4(2): 103-112.

[11] Zhang Jiawei, Liu Fang. The circuit design and error analysis of high precision strain detection[J]. Process automation instrumentation. 2011, 32(6): 83-86.