Fabrication and Ethanol Sensing Characterization of Tin Oxide Nanorods Prepared by Glancing Angle Deposition Technique

Chaiyan Oros; Anurat Wisitsoraat; Mati Horprathum

doi:10.4028/www.scientific.net/KEM.675-676.163

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 675-676Fabrication and Ethanol Sensing Characterization...

Fabrication and Ethanol Sensing Characterization of Tin Oxide Nanorods Prepared by Glancing Angle Deposition Technique

Abstract:

In this work, the nanorod structure of Tin oxide (SnO₂) prepared by glancing angle deposition (GLAD) technique with different O₂ flow rate from 12 to 48 sccm. The surface and Crystal structure of SnO₂ thin films were characterized by scanning electron microscopy (SEM), X-raydiffraction (XRD) and tested toward ethanol gas sensing. Structural characterization showed that the morphological of all SnO₂ thin films prepared with different O₂ flow rates consists of columnar nanorod structures and the nanorod size which are likely to decrease as the O₂ flow rate increases. As the O₂ flow rate increases from 12 to 48 sccm, the crystal structure of SnO₂ nanorods changes from amorphous to crystalline and the crystallinity is improved by the increase of the O₂ flow rate. Gas sensing performances of SnO₂ nanorods have been characterized toward ethanol sensing. It was found that SnO₂ nanorods exhibit n-type conductivity with decreased resistance when exposed to ethanol, which is reducing gas. In addition, sensitivity to ethanol tend to improve as O₂ flow rate increases. Furthermore, the SnO₂ nanorods prepared at O₂ flow rates 48 sccm are detecting ethanol gas at concentrations lower than 50 ppm at operating temperature 250 °C.

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Periodical:

Key Engineering Materials (Volumes 675-676)

Pages:

163-166

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.675-676.163

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Online since:

January 2016

Authors:

Chaiyan Oros*, Anurat Wisitsoraat, Mati Horprathum

Keywords:

Gas-Sensing, Glancing-Angle Deposition, Nanorod Structure, TiN Oxide

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References

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