Microfabrication and Characterization of Tool Embedded Ni-Chrome Thin Film Micro-Sensors for Cutting Force Measurement

Abstract:

This paper investigated the fabrication and design of embedded Ni-chrome thin-film strain gauges as micro-sensors in tool holders to measure the cutting force in machining operations. A Ni-chrome thin film as piezoresistive material sensor device is embedded within a substrate structure through brazing bonding process, which consists of a Ti6Al4V substrate, a Nickel-chromium thin film sensor and an Alumina insulating layer. The thin-films were characterized by 3D Super Depth Digital Microscope, SEM/EDS, Stylus profiler, to study microstructure, material composition, thickness and sheet resistance respectively. The thin-film strain gauges are calibrated in a cantilever beam setup. Accordingly, in-process cutting force measurement systems are established. The results showed that the thin-film sensor had good linearity and more elaborate structure and superior properties.

• Periodical: Key Engineering Materials (Volume 693)
• Pages: 1074-1081
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.693.1074
• Online since: May 2016
• Authors: Yun Ping Cheng*, Wen Ge Wu, Xiao Jun Du, Chun Hua An
• Keywords: Characterization, Cutting Force Measurement, Ni-Chrome, Thin Film Micro-Sensor

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