Sintering of High Quality Titanium-Doped Zinc Oxide Ceramic Sputtering Target

Abstract:

The ultrahigh density zinc oxide doped with 1wt% TiO₂ (ZTO) ceramic targets were prepared by pressureless sintering. Scanning electron microscopy and X-ray diffraction analysis were used to characterize the morphologies and structure of the sintered ZTO targets. The effects of the sintering temperatures on the microstructure, densification behavior, mechanical and electrical properties were discussed and the optimal sintering condition was obtained. The ZTO targets sintered at 1350°C for 3 hours achieved a relative density of 99.7%, a bending strength of 115MPa, a Vickers hardness of 222.16HV and a a electrical resistivity of 1Ω·cm, which was excellent as a high-quality sputtering target to deposit ZnO-based transparent conductive films.

• Periodical: Key Engineering Materials (Volume 697)
• Pages: 198-202
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.697.198
• Online since: July 2016
• Authors: Chen Bing Pi, Xue Xian Cai, Chao Xiao, Hai Peng Yang, Ji Hua Gao, Ling Gao, Hai Tao Yang
• Keywords: Sintering, ZNO, ZTO Ceramic Target

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