Phase Evolution and Properties of Li₂O-Al₂O₃-SiO₂-Based Glass-Ceramic for LTCC Applications

Abstract:

In this paper, the influences of sintering conditions on the phase transformation, microstructure, bulk density, bending strength, coefficient of thermal expansion, and dielectric properties of Li₂O-Al₂O₃-SiO₂ glass-ceramic were investigated. Conventional melt-quenching method was used to synthesize this glass-ceramic. Scanning electron microscopy, X-ray diffractometer and differential thermal analysis were employed to study this material. The XRD data show that Li₂OAl₂O₃7.5SiO₂ is the main crystalline phase of this glass-ceramic. ZrO₂ and CaMgSi₂O₆ are the two other phases in this glass-ceramic. The increasing sintering temperature and soaking time affect the phase composition obviously, which lead to the obvious variations of microstructure, mechanical, dielectric and thermal properties of this glass-ceramic. Sintering temperature and time play a key role in the sintering of Li₂O-Al₂O₃-SiO₂ glass-ceramic. The sample sintered at 800 °C for 30 min showed good microstructure, low sintering temperature of 800 °C, high density of ~2.6 g/cm³, excellent dielectric properties (εr: ~6.9, tan δ: ~2*10^-3), good bending strength of 143 MPa and adjustable CTE from 1.1 to 2.7 *10^-6 K^-1 close that of silicon. These results mean that the obtained LAS glass-ceramic can be used in the application of LTCC substrate, especially, the manufacture of the substrate of silicon.

• Periodical: Key Engineering Materials (Volume 697)
• Pages: 257-261
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.697.257
• Online since: July 2016
• Authors: Zhen Jun Qing, Bo Li*, Din An Duan, Hao Li, Ying Xiang Li, Shu Ren Zhang
• Keywords: CTE, Glass-Ceramics, Li₂O-Al₂O₃-SiO₂, LTCC, Sintering Temperature

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