Mathematical Model of the Influence of Chemisorption Process on Electrophysical Parameters of Nanosized ZnO Films

Abstract:

We have developed a mathematical model of electrophysical and gas sensitive properties of nanosized ZnO film during chemisorption of gas molecules of CO, CO₂, CH₄, and NO₂ on its surface and figured out regularities of influence of thickness of depletion layer of nanosized ZnO films on their electric and gas sensitivity properties. We have determined optimal range of working temperatures and thicknesses of nanosized ZnO films for detecting CO, CO₂ CH₄, and NO₂ with maximum gas sensitivity and selectivity and theoretical investigated gas-sensitivity properties of nanosized ZnO films.

• Periodical: Key Engineering Materials (Volume 709)
• Pages: 82-85
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.709.82
• Online since: September 2016
• Authors: Ilya A. Shipulin*, Evgeny G. Zamburg, Oleg A. Ageev
• Keywords: Chemisorption, Electrophysical Properties, Gas Sensitivity, Nanosized Films, Zinc Oxide

References

[1] G. Korotcenkov, Metal oxides for solid-state gas sensors: What determines our choice?, Materials Science and Engineering B 139 (2007) 1-23.

DOI: 10.1016/j.mseb.2007.01.044

[2] E. Comini, Metal oxide Nano-crystals for gas sensing, Anal. Chim. Acta. 568 (2006) 28 - 40.

DOI: 10.1016/j.aca.2005.10.069

[3] O. A. Ageev, A. P. Dostanko, E. G. Zamburg, et. al., Electrical and Optical Properties of Zinc Oxide Films Deposited by the Ion Beam Sputtering of an Oxide Target, Semiconductors 48 (9) (2014) 1274-1279.

DOI: 10.1134/s1063782614090073

[4] O. A. Ageev, D.A. Golosov, et. al., Researching Influence of IBAD PLD Parameters on Properties of Nanocrystalline ZnO Thin Films, App. Mech. and Mat. 481 (2014) 55-59.

DOI: 10.4028/www.scientific.net/amm.481.55

[5] O.A. Ageev, E.Y. Gusev, E.G. Zamburg, et. al., Nanocrystalline ZnO Films Grown by PLD for NO2 and NH3 Sensor App. Mech. and Materials 475- 476 (2014) 446-450.

DOI: 10.4028/www.scientific.net/amm.475-476.446

[6] O.A. Ageev, A.P. Dostanko, E.G. Zamburg, et. al., Effect of the Processes in the Laser Ablation Plume on the Resistivity and Morphology of Nanocrystalline ZnO Films, Phys. of the Sol. St. 57 (2015) 2093-(2098).

DOI: 10.1134/s1063783415100029

[7] G. Korotcenkov, Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches, Sensors and Actuators B 107 (2005) 209-232.

DOI: 10.1016/j.snb.2004.10.006

[8] K. Ellmer, Resistivity of polycrystalline zinc oxide: Current status and physical limit, J. Phys. D: Appl. Phys. 34 (2001) 3097-3108.

DOI: 10.1088/0022-3727/34/21/301

[9] N. Barsan, U. Weimar, Conduction model of metal oxide gas sensors, J. of Electroceramics 7 (2001) 143-167.

[10] G. Sakai, et. al., Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor, Sensors and Actuators B 80 (2001) 125-131.

DOI: 10.1016/s0925-4005(01)00890-5

[11] K. Ellmer, A. Klein, B. Rech, Transparent Conductive Zinc Oxide: Basics and Applications in Thin Film Solar Cells, Springer-Verlag: Berlin, Germany, 2008, pp.35-72.

DOI: 10.1007/978-3-540-73612-7

[12] J.F. Chang, et. al., The effects of thickness and operation temperature on ZnO: Al thin film CO gas sensor, Sensors and Actuators B 84 (2002) 258-264.

DOI: 10.1016/s0925-4005(02)00034-5